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Fully Automatic Inner-Layer UV-LED Exposure System

Ledex-6907A/B
Fully Automatic Inner-Layer UV-LED Exposure System

Applicable to Inner-Layer Wet Film Process

Double-Sided Exposure
High Alignment Accuracy for Upper and Lower Photomasks
High Throughput
High Registration Precision

 

*Optional large-format stage: 660 × 762 mm*

規格資料
項次 規格
Resolution Capability 50/50
Light Source UV LED × 2
Photomask Area 610 × 660 mm
Number of Optical Units 4
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